Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces
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Nowak, Stanislaw H.
Physics Department, University of Fribourg, Switzerland
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Banaś, D.
Institute of Physics, Jan Kochanowski University, Kielce, Poland
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Błachucki, Wojciech
Physics Department, University of Fribourg, Switzerland
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Cao, Wei
Physics Department, University of Fribourg, Switzerland
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Dousse, Jean-Claude
Physics Department, University of Fribourg, Switzerland
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Hönicke, P.
Physikalisch-Technische Bundesanstalt, Berlin, Germany
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Hoszowska, Joanna
Physics Department, University of Fribourg, Switzerland
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Jabłoński, Ł.
Institute of Physics, Jan Kochanowski University, Kielce, Poland
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Kayser, Yves
Physics Department, University of Fribourg, Switzerland
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Kubala-Kukuś, A.
Institute of Physics, Jan Kochanowski University, Kielce, Poland
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Pajek, M.
Institute of Physics, Jan Kochanowski University, Kielce, Poland
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Reinhardt, F.
Physikalisch-Technische Bundesanstalt, Berlin, Germany
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Savu, A.V.
Microsystems Laboratory (LMIS1), Ecole Polytechnique Fédérale de Lausanne, Switzerland
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Szlachetko, Jakub
Institute of Physics, Jan Kochanowski University, Kielce, Poland - Paul Scherrer Institut, Villigen PSI, Switzerland
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Published in:
- Spectrochimica Acta Part B: Atomic Spectroscopy. - 2014, vol. 98, p. 65-75
English
Various 3-dimensional nano-scaled periodic structures with different configurations and periods deposited on the surface of silicon and silica substrates were investigated by means of the grazing incidence and grazing emission X-ray fluorescence techniques. Apart from the characteristics which are typical for particle- and layer-like samples, the measured angular intensity profiles show additional periodicity-related features. The latter could be explained by a novel theoretical approach based on simple geometrical optics (GO) considerations. The new GO-based calculations were found to yield results in good agreement with experiment, also in cases where other theoretical approaches are not valid, e.g., periodic particle distributions with an increased surface coverage.
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Faculty
- Faculté des sciences et de médecine
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Department
- Département de Physique
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Language
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Classification
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Physics
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License
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License undefined
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Identifiers
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Persistent URL
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https://folia.unifr.ch/unifr/documents/303784
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