Journal article

Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces

  • Nowak, Stanislaw H. Physics Department, University of Fribourg, Switzerland
  • Banaś, D. Institute of Physics, Jan Kochanowski University, Kielce, Poland
  • Błachucki, Wojciech Physics Department, University of Fribourg, Switzerland
  • Cao, Wei Physics Department, University of Fribourg, Switzerland
  • Dousse, Jean-Claude Physics Department, University of Fribourg, Switzerland
  • Hönicke, P. Physikalisch-Technische Bundesanstalt, Berlin, Germany
  • Hoszowska, Joanna Physics Department, University of Fribourg, Switzerland
  • Jabłoński, Ł. Institute of Physics, Jan Kochanowski University, Kielce, Poland
  • Kayser, Yves Physics Department, University of Fribourg, Switzerland
  • Kubala-Kukuś, A. Institute of Physics, Jan Kochanowski University, Kielce, Poland
  • Pajek, M. Institute of Physics, Jan Kochanowski University, Kielce, Poland
  • Reinhardt, F. Physikalisch-Technische Bundesanstalt, Berlin, Germany
  • Savu, A.V. Microsystems Laboratory (LMIS1), Ecole Polytechnique Fédérale de Lausanne, Switzerland
  • Szlachetko, Jakub Institute of Physics, Jan Kochanowski University, Kielce, Poland - Paul Scherrer Institut, Villigen PSI, Switzerland
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    01.08.2014
Published in:
  • Spectrochimica Acta Part B: Atomic Spectroscopy. - 2014, vol. 98, p. 65-75
English Various 3-dimensional nano-scaled periodic structures with different configurations and periods deposited on the surface of silicon and silica substrates were investigated by means of the grazing incidence and grazing emission X-ray fluorescence techniques. Apart from the characteristics which are typical for particle- and layer-like samples, the measured angular intensity profiles show additional periodicity-related features. The latter could be explained by a novel theoretical approach based on simple geometrical optics (GO) considerations. The new GO-based calculations were found to yield results in good agreement with experiment, also in cases where other theoretical approaches are not valid, e.g., periodic particle distributions with an increased surface coverage.
Faculty
Faculté des sciences et de médecine
Department
Département de Physique
Language
  • English
Classification
Physics
License
License undefined
Identifiers
Persistent URL
https://folia.unifr.ch/unifr/documents/303784
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