Journal article

A photopatternable superparamagnetic nanocomposite: Material characterization and fabrication of microstructures

  • Suter, M. Micro and Nanosystems, ETH Zürich, Switzerland
  • Ergeneman, , O. Multi-Scale Robotics Lab, Institute of Robotics and Intelligent Systems, ETH Zürich, Switzerland
  • Zürcher, J. Micro and Nanosystems, ETH Zürich, Switzerland
  • Moitzi, Christian Adolphe Merkle Institute, University of Fribourg, Switzerland
  • Pané, S. Multi-Scale Robotics Lab, Institute of Robotics and Intelligent Systems, ETH Zürich, Switzerland
  • Rudin, T. Particle Technology Laboratory, ETH Zürich, Switzerland
  • Pratsinis, S.E. Particle Technology Laboratory, ETH Zürich, Switzerland
  • Nelson, B.J. Multi-Scale Robotics Lab, Institute of Robotics and Intelligent Systems, ETH Zürich, Switzerland -
  • Hierold, C. Micro and Nanosystems, ETH Zürich, Switzerland
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    28.04.2011
Published in:
  • Sensors and Actuators B: Chemical. - 2011, vol. 156, no. 1, p. 433-443
English A superparamagnetic nanocomposite obtained by dispersing superparamagnetic magnetite nanoparticles in the epoxy SU-8 is used to fabricate microstructures by photolithography. The dispersion of the nanoparticles and the level of agglomerations are analyzed by optical microscopy, TEM (transmission electron microscope), SAXS (small-angle X-ray scattering), XDC (X-ray disc centrifuge) and XRD (X-ray diffraction). Two different phosphate-based dispersing agents are compared. In order to obtain a high-quality nanocomposite, the influence of particle concentration 1–10 vol.% (4–32 wt.%) on composite fabrication steps such as spin coating and UV exposure are systematically analyzed. Features with narrow widths (down to 1.3 μm) are obtained for composites with 5 vol.% particle concentration. Mechanical, magnetic and wetting properties of the nanocomposites are characterized. These nanocomposites exhibit superparamagnetic properties with a saturation magnetization up to 27.9 kA m⁻¹ for10 vol.%. All nanocomposites show no differences in surface polarity with respect to pure SU-8, and exhibit a moderate hydrophobic behavior (advancing dynamic contact angles approximately 81°). Microcantilevers with particle concentrations of 0–5 vol.% were successfully fabricated and were used to determine the dynamic Young's modulus of the composite. A slight increase of the Young's modulus with increased particle concentration from 4.1 GPa (pure SU-8) up to 5.1 GPa (for 5 vol.%) was observed.
Faculty
Faculté des sciences
Department
Adolphe Merkle Institute
Language
  • English
Classification
Physics
License
License undefined
Identifiers
Persistent URL
https://folia.unifr.ch/unifr/documents/302026
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