Journal article

Depth profiles of Al impurities implanted in Si wafers determined by means of the high-resolution grazing emission X-ray fluorescence technique

  • Kayser, Yves Department of Physics, University of Fribourg, Switzerland
  • Banaś, D. Institute of Physics, Jan Kochanowski University, Poland
  • Cao, Wei Department of Physics, University of Fribourg, Switzerland
  • Dousse, Jean-Claude Department of Physics, University of Fribourg, Switzerland
  • Hoszowska, Joanna Department of Physics, University of Fribourg, Switzerland
  • Jagodziński, P. Institute of Physics, Jan Kochanowski University, Poland
  • Kavčič, Matjaz J. Stefan Institute, Ljubljana, Slovenia
  • Kubala-Kukuś, A. Institute of Physics, Jan Kochanowski University, Poland
  • Nowak, S. Department of Physics, University of Fribourg, Switzerland
  • Pajek, M. Institute of Physics, Jan Kochanowski University, Poland
  • Szlachetko, Jakub Institute of Physics, Jan Kochanowski University, Poland - European Synchrotron Radiation Facility (ESRF), Grenoble, France
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    19.02.2010
Published in:
  • Spectrochimica Acta Part B: Atomic Spectroscopy. - 2010
English The synchrotron radiation based high-resolution grazing emission X-ray fluorescence (GEXRF) technique was used to extract the distribution of Al ions implanted with a dose of 10¹⁶ atoms/cm² in Si wafers with energies ranging between 1 and 100 keV. The depth distributions of the implanted ions were deduced from the measured angular profiles of the Al-Kα X-ray fluorescence line with nanometer-scale precision. The experimental results were compared to theoretical predictions of the depth distributions resulting from ion implantation. A good agreement between experiment and theory was found which proved that the presented high-resolution grazing emission X-ray fluorescence technique is well suited to perform depth profiling measurements of impurities located within the extinction depth, provided the overall shape of the distribution can be assumed a priori.
Faculty
Faculté des sciences
Department
Physique
Language
  • English
Classification
Physics
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License undefined
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Persistent URL
https://folia.unifr.ch/unifr/documents/301724
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