Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip–One-Channel Setup

• Yoshikawa, Genki World Premier International (WPI) Research Center, International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
• Loizeau, Frederic Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Jaquet-Droz 1, Neuchâtel CH-2002, Switzerland
• Lee, Cory J. Y. University of Waterloo, 200 University Avenue West, Waterloo, Ontario N2L 3G1, Canada
• Akiyama, Terunobu Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Jaquet-Droz 1, Neuchâtel CH-2002, Switzerland
• Shiba, Kota World Premier International (WPI) Research Center, International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
• Gautsch, Sebastian Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Jaquet-Droz 1, Neuchâtel CH-2002, Switzerland
• Nakayama, Tomonobu World Premier International (WPI) Research Center, International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan
• Vettiger, Peter Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Jaquet-Droz 1, Neuchâtel CH-2002, Switzerland
• de Rooij, Nico F. Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Jaquet-Droz 1, Neuchâtel CH-2002, Switzerland
• Aono, Masakazu World Premier International (WPI) Research Center, International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

Spectroscopy

Electrochemistry

General Materials Science

Surfaces and Interfaces

Condensed Matter Physics