Nanoparticle production from HMDSO in atmospheric pressure argon-oxygen plasma
Journal article

Nanoparticle production from HMDSO in atmospheric pressure argon-oxygen plasma

  • Wallimann, Roger ORCID ETH Zurich Institute of Process Engineering; Sonneggstrasse 3 8092 Zurich Switzerland
  • Roth, Christian ETH Zurich Institute of Process Engineering; Sonneggstrasse 3 8092 Zurich Switzerland
  • Rudolf von Rohr, Philipp ETH Zurich Institute of Process Engineering; Sonneggstrasse 3 8092 Zurich Switzerland
  • 2018-3-7
Published in:
  • Plasma Processes and Polymers. - Wiley. - 2018, vol. 15, no. 5, p. 1700202
Language
  • English
Open access status
closed
Identifiers
Persistent URL
https://folia.unifr.ch/global/documents/238646
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