Dolabella, Simone Frison, Ruggero Chahine, Gilbert A. Richter, Carsten Schulli, Tobias U. Tasdemir, Zuhal Alaca, B. Erdem Leblebic, Yusuf Dommann, Alex Neels, Antonia 2020-02-01 Silicon nanowire-based sensors find many applications in micro- and nano- electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and nano-fabricated silicon-based structures adopting the scanning X-ray diffraction microscopy technique for mapping the in-plane crystalline strain ([epsilon]044) and tilt of a device which includes pillars with suspended nanowires on a substrate. It is shown how the micro- and nanostructures of this new type of nanowire system are influenced by critical steps of the fabrication process, such as electron-beam lithography and deep reactive ion etching. X-ray analysis performed on the 044 reflection shows a very low level of lattice strain (< 0.00025 Δd/d) but a significant degree of lattice tilt (up to 0.214°). This work imparts new insights into the crystal structure of micro- and nanomaterial-based sensors, and their relationship with critical steps of the fabrication process. application/pdf https://folia.unifr.ch/global/documents/308616 https://folia.unifr.ch/documents/308616/files/nee_rqt.pdf https://folia.unifr.ch/documents/308616/files/nee_rqt_sm.pdf eng info:eu-repo/semantics/altIdentifier/doi/10.1107/S1600576719015504 info:eu-repo/semantics/openAccess License undefined Journal of Applied Crystallography. - 2020, vol. 53, no. 1, p. 58–68 info:eu-repo/classification/udc/54 Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊044) and tilt of suspended monolithic silicon nanowire structures http://purl.org/coar/resource_type/c_6501